A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom
Yongquan Su, Yichen Liu, Yang Wang, Qianying Sun, Qifeng Qiao, Zhichao Weng, Lihao Wang, Zhenyu Wu, Zhenyu Wu
Topics & Concepts
Microelectromechanical systemsPiezoelectricityMaterials scienceDegrees of freedom (physics and chemistry)OpticsOptoelectronicsPhysicsComposite materialQuantum mechanicsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators