Mechanical properties of TiN deposited in synchronous bias mode through high-power impulse magnetron sputtering
Jian-Fu Tang, Shi‐Yu Huang, Ja‐Hon Lin, Fu-Chi Yang, Chi-Lung Chang
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceTinBiasingSputter depositionIonAnalytical Chemistry (journal)CoatingResidual stressCavity magnetronComposite materialSputteringSubstrate (aquarium)PlasmaThin filmMetallurgyNanotechnologyVoltageChemistryElectrical engineeringGeologyEngineeringPhysicsOrganic chemistryChromatographyOceanographyQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis