Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide
Zhonghuai Wu, Liangchi Zhang
Topics & Concepts
Materials scienceNanoindentationIndentationAmorphous solidComposite materialMonocrystalline siliconSilicon carbideDeformation (meteorology)DislocationAmorphous siliconCarbideLayer (electronics)Surface layerIndentation hardnessDeformation mechanismSiliconCrystallographyMetallurgyCrystalline siliconMicrostructureChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing Techniques