Litcius/Paper detail

Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide

Zhonghuai Wu, Liangchi Zhang

2021Journal of Material Science and Technology29 citationsDOI

Topics & Concepts

Materials scienceNanoindentationIndentationAmorphous solidComposite materialMonocrystalline siliconSilicon carbideDeformation (meteorology)DislocationAmorphous siliconCarbideLayer (electronics)Surface layerIndentation hardnessDeformation mechanismSiliconCrystallographyMetallurgyCrystalline siliconMicrostructureChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing Techniques
Mechanical properties and deformation mechanisms of surface-modified 6H-silicon carbide | Litcius