Litcius/Paper detail

Non-traditional machining techniques for silicon wafers

Noor Dzulaikha Daud, Md. Nazibul Hasan, Tanveer Saleh, Pei Ling Leow, Mohamed Sultan Mohamed Ali

2022The International Journal of Advanced Manufacturing Technology19 citationsDOI

Topics & Concepts

Surface micromachiningMachiningMaterials scienceMicroelectromechanical systemsMicroelectronicsWaferFabricationLaser beam machiningBulk micromachiningSiliconNanotechnologyOptoelectronicsLaserMetallurgyOpticsLaser beamsAlternative medicineMedicinePhysicsPathologyAdvanced Machining and Optimization TechniquesAdvanced Surface Polishing TechniquesLaser Material Processing Techniques