Non-traditional machining techniques for silicon wafers
Noor Dzulaikha Daud, Md. Nazibul Hasan, Tanveer Saleh, Pei Ling Leow, Mohamed Sultan Mohamed Ali
Topics & Concepts
Surface micromachiningMachiningMaterials scienceMicroelectromechanical systemsMicroelectronicsWaferFabricationLaser beam machiningBulk micromachiningSiliconNanotechnologyOptoelectronicsLaserMetallurgyOpticsLaser beamsAlternative medicineMedicinePhysicsPathologyAdvanced Machining and Optimization TechniquesAdvanced Surface Polishing TechniquesLaser Material Processing Techniques