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The effect of Si content on structural, mechanical and optical behaviour of magnetron sputtered Al–Si–N nanocomposite thin films

Soni, S. K. Sharma, S.K. Mishra

2020Journal of Alloys and Compounds13 citationsDOI

Topics & Concepts

NanoindentationMaterials scienceMicrostructureSiliconNanocompositeSputter depositionComposite materialScanning electron microscopeThin filmPolycrystalline siliconCrystalliteCavity magnetronTransmission electron microscopySputteringMetallurgyNanotechnologyThin-film transistorLayer (electronics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices
The effect of Si content on structural, mechanical and optical behaviour of magnetron sputtered Al–Si–N nanocomposite thin films | Litcius