A composite structure pressure sensor based on quartz DETF resonator
Ziming Ren, Yonghong Qi, Minghui Zhao, Bin Li, Weixuan Jing, Xueyong Wei
Topics & Concepts
Materials sciencePressure sensorResonatorSensitivity (control systems)Tuning forkRepeatabilityQuartzHysteresisInterference (communication)Composite numberSiliconDiaphragm (acoustics)Pressure measurementOptoelectronicsAcousticsComposite materialElectrical engineeringElectronic engineeringEngineeringChemistryVibrationQuantum mechanicsChannel (broadcasting)PhysicsMechanical engineeringChromatographyAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators