Litcius/Paper detail

On the applications of additive manufacturing in semiconductor manufacturing equipment

Jiahui Ye, Ahmed El Desouky, Alaa Elwany

2024Journal of Manufacturing Processes34 citationsDOI

Topics & Concepts

Materials scienceSemiconductor device fabricationManufacturing engineeringSemiconductorNanotechnologyProcess engineeringEngineering physicsOptoelectronicsEngineeringWaferAdditive Manufacturing and 3D Printing TechnologiesAdditive Manufacturing Materials and ProcessesManufacturing Process and Optimization