High piezoelectric property with exceptional stability in self-poled ferroelectric films
Lisha Liu, Jiaojiao Yi, Kun Xu, Zhen Liu, Mingmeng Tang, Le Dai, Xuan Gao, Yang Liu, Shuhao Wang, Zhang Zhang, Liang Shu, Jing‐Feng Li, Shujun Zhang, Yaojin Wang
Abstract
Ferroelectric films are highly sought-after in micro-electro-mechanical systems, particularly with the trend towards miniaturization. However, their tendency to depolarize and degradation in piezoelectric properties when exposed to packaging procedures at temperatures exceeding 260 °C remains a significant challenge. Here, we reveal the prerequisites for self-poling and leverage these insights to achieve unprecedented macroscopic performance through a two-step approach involving texture construction and hierarchical heterogeneity engineering. The significant [001] texture and fine Zr/Ti heterogeneity, facilitated by a PbO-TiO2 buffer, enable a piezoelectric charge coefficient of 550 pC/N in self-poled Pb(Zr0.52Ti0.48)O3 film. This material demonstrates impressive resilience to elevated temperatures up to 300 °C, experiencing less than a 16% degradation in performance. Our approach can be extended to other ferroelectric systems, offering an innovative solution for high-temperature packaging and harsh environments in practical electro-mechanical applications. The authors realize a high piezoelectric charge coefficient in a self-poled ferroelectric film, addressing the persistent challenge of piezoelectric property degradation during industrial packaging and shaping the landscape of commercial ferroelectrics for micro-electro-mechanical systems.