Remote heteroepitaxy of GaN microrod heterostructures for deformable light-emitting diodes and wafer recycle
Junseok Jeong, Qingxiao Wang, Janghwan Cha, Dae Kwon Jin, Dong Hoon Shin, Sunah Kwon, Bong Kyun Kang, Jun Hyuk Jang, Woo Seok Yang, Yong Seok Choi, Jinkyoung Yoo, Jong Kyu Kim, Chul‐Ho Lee, Sang Wook Lee, Anvar Zakhidov, Suklyun Hong, Moon J. Kim, Young Joon Hong
Abstract
wafer across graphene. The use of graphene allows the transfer of MR LED arrays onto a copper plate, and spatially separate MR arrays offer ideal device geometry suitable for deformable LED in various shapes without serious device performance degradation. Moreover, remote heteroepitaxy also allows the wafer to be reused, allowing reproducible production of MR LEDs using a single substrate without noticeable device degradation. The remote heteroepitaxial relation is determined by high-resolution scanning transmission electron microscopy, and the density functional theory simulations clarify how the remote heteroepitaxy is made possible through graphene.