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Preparation of silicon carbide and tantalum carbonitride composite with high hardness and moderate elastic modulus by laser chemical vapor deposition for anti-erosion protective coatings

Hirokazu Katsui, Kazuya Shimoda, Mikinori Hotta

2023Ceramics International18 citationsDOI

Topics & Concepts

Materials scienceNanoindentationComposite materialChemical vapor depositionSilicon carbideTantalum nitrideCrystallinityTantalumSilicon nitrideCoatingLayer (electronics)MetallurgyNanotechnologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced ceramic materials synthesis
Preparation of silicon carbide and tantalum carbonitride composite with high hardness and moderate elastic modulus by laser chemical vapor deposition for anti-erosion protective coatings | Litcius