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High sensitivity Ga2O3 ultraviolet photodetector by one-step thermal oxidation of p-GaN films

Jinjin Wang, Xueqiang Ji, Zuyong Yan, Xu Yan, Chao Lu, Zhitong Li, Qi Song, Shan Li, Xiaohui Qi, Sai Zhang, Shengrun Hu, Peigang Li, Shengrun Hu, Peigang Li

2023Materials Science in Semiconductor Processing35 citationsDOI

Topics & Concepts

Materials scienceResponsivityPhotodetectorOptoelectronicsQuantum efficiencyDark currentUltravioletThin filmThermal oxidationPhotoelectric effectBand gapArgonOpticsNanotechnologySiliconAtomic physicsPhysicsGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials
High sensitivity Ga2O3 ultraviolet photodetector by one-step thermal oxidation of p-GaN films | Litcius