In-situ phosphorus-doped polysilicon prepared using rapid-thermal anneal (RTA) and its application for polysilicon passivated-contact solar cells
Qing Yang, Mingdun Liao, Zhixue Wang, Jingming Zheng, Yiran Lin, Xueqi Guo, Zhe Rui, Dandan Huang, Linna Lu, Mengmeng Feng, Peihong Cheng, Chunhui Shou, Yuheng Zeng, Baojie Yan, Jichun Ye
Topics & Concepts
Materials sciencePassivationAnnealing (glass)Amorphous siliconDopingPlasma-enhanced chemical vapor depositionPolysilicon depletion effectSiliconAmorphous solidOptoelectronicsCrystalline siliconComposite materialVoltageElectrical engineeringLayer (electronics)Gate oxideChemistryOrganic chemistryEngineeringTransistorSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence