Design and fabrication of a novel MEMS piezoelectric hydrophone
Shuzheng Shi, Wenping Geng, Kaixi Bi, Jian He, Xiaojuan Hou, Jiliang Mu, LI Fen, Xiujian Chou
Topics & Concepts
HydrophoneLead zirconate titanateAcousticsPiezoelectricityMicroelectromechanical systemsMaterials scienceSensitivity (control systems)UnderwaterSonarPiezoelectric accelerometerNoise (video)PMUTElectronic engineeringEngineeringComputer scienceOptoelectronicsFerroelectricityPhysicsGeologyArtificial intelligenceImage (mathematics)DielectricOceanographyUnderwater Acoustics ResearchAcoustic Wave Resonator TechnologiesUnderwater Vehicles and Communication Systems