The fabrication of anti-reflection grating structures film for solar cells using vibration-assisted UV nanoimprint lithography
Yan Gu, Jichen Xu, Jieqiong Lin, Haihang Ma, Huibo Zhao, Yishuo Zhang, Sun Baoyu
Topics & Concepts
Nanoimprint lithographyGratingMaterials scienceVibrationPhotoresistOptoelectronicsFabricationFinite-difference time-domain methodOpticsEnergy conversion efficiencyComposite materialAcousticsLayer (electronics)Alternative medicinePhysicsMedicinePathologyNanowire Synthesis and ApplicationsNanofabrication and Lithography TechniquesOptical Coatings and Gratings