Static and dynamic actuations of clamped-clamped V-shaped micro-resonators under electrostatic forces
Nouha Alcheikh, Hassen M. Ouakad, Sofiane Ben Mbarek, Mohammad I. Younis
Topics & Concepts
ResonatorFinite element methodBeam (structure)VibrationDeflection (physics)Materials scienceMicroelectromechanical systemsNonlinear systemStructural engineeringAcousticsMechanicsEngineeringPhysicsClassical mechanicsOptoelectronicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies