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The influence of magnetic circuit and operating parameters on the plasma property of 2 cm ECRIT ion source

Xu Xia, Juan Yang, Yizhou Jin, Guanrong Hang, Yuliang Fu, Zhan Hu

2020Vacuum20 citationsDOI

Topics & Concepts

Ion sourceLangmuir probeElectron cyclotron resonancePlasmaIonAtomic physicsElectron temperaturePlasma parametersChemistryVolumetric flow ratePlasma parameterMicrowaveMagnetic fieldAnalytical Chemistry (journal)Materials sciencePlasma diagnosticsPhysicsQuantum mechanicsOrganic chemistryChromatographyPlasma Diagnostics and ApplicationsElectrohydrodynamics and Fluid DynamicsParticle accelerators and beam dynamics
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