Design and analysis of new ultra compact decoupled XYZ<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" id="d1e965" altimg="si25.svg"><mml:mi>θ</mml:mi></mml:math> stage to achieve large-scale high precision motion
Xigang Chen, Yangmin Li, Yanlin Xie, Ruobing Wang
Topics & Concepts
Decoupling (probability)HingeActuatorComputer scienceDisplacement (psychology)Motion (physics)AlgorithmGeometryTopology (electrical circuits)SimulationComputer graphics (images)Artificial intelligenceMathematicsEngineeringMechanical engineeringCombinatoricsControl engineeringPsychologyPsychotherapistPiezoelectric Actuators and ControlIterative Learning Control SystemsForce Microscopy Techniques and Applications