Litcius/Paper detail

Electronically integrated, mass-manufactured, microscopic robots

Marc Z. Miskin, Alejandro J. Cortese, Kyle Dorsey, Edward Esposito, Michael Reynolds, Qingkun Liu, Michael C. Cao, David A. Muller, Paul L. McEuen, Itai Cohen

2020Nature344 citationsDOI

Topics & Concepts

MicroelectronicsRobotWaferActuatorLithographyComputer scienceVoltageNanotechnologyElectrical engineeringSiliconIntegrated circuitFabricationSemiconductorMaterials scienceOptoelectronicsArtificial intelligenceEngineeringMedicinePathologyAlternative medicineMicro and Nano RoboticsAdvanced Sensor and Energy Harvesting MaterialsNeuroscience and Neural Engineering