F, Mg and Ga co-doped ZnO transparent conductive thin films by dual-target magnetron sputtering: Fabrication, structure, and characteristics
Yang Liu, Qingdong Zeng, Changjiang Nie, Huaqing Yu
Topics & Concepts
Materials scienceWurtzite crystal structureSputteringOptoelectronicsSputter depositionFigure of meritDopingThin filmTransmittanceFabricationElectrical resistivity and conductivityCrystalliteSurface roughnessNanotechnologyComposite materialMetallurgyZincMedicineEngineeringPathologyAlternative medicineElectrical engineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsGa2O3 and related materials