Investigation on the preparation of large area diamond films with 150–200 mm in diameter using 915 MHz MPCVD system
Jun Weng, F. Liu, Z.T. Wang, Naihao Guo, Feiyang Fan, Zhi Yang, Juan Wang, H. Wang, Liwei Xiong, Hongyang Zhao, J.H. Wang
Topics & Concepts
DiamondChemical vapor depositionSubstrate (aquarium)Full width at half maximumMaterials sciencePlasmaDeposition (geology)MicrowaveAnalytical Chemistry (journal)Volumetric flow rateOptoelectronicsComposite materialChemistryPhysicsGeologyChromatographySedimentQuantum mechanicsOceanographyPaleontologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites