A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling
Zhongye Wu, Ronghui Feng, Chengliang Sun, Peng Wang, Guoqiang Wu
Topics & Concepts
GyroscopeVibrating structure gyroscopeQuadrature (astronomy)Microelectromechanical systemsRate integrating gyroscopeFinite element methodPhysicsStiffnessControl theory (sociology)Electronic engineeringAcousticsComputer scienceOpticsEngineeringOptoelectronicsControl (management)Quantum mechanicsThermodynamicsArtificial intelligenceAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies