Electric-field-modulated oxidation and its effect on photoelectrochemical mechanical polishing of 4H-SiC
Yang Zhao, Shang Gao, Yuewen Sun, Yueqin Wu, Fan Yang, Renke Kang, Zhigang Dong
Topics & Concepts
PolishingElectric fieldMaterials scienceChemical-mechanical planarizationField (mathematics)Mechanical engineeringOptoelectronicsComposite materialEngineeringPhysicsQuantum mechanicsMathematicsPure mathematicsAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devices