Growth of single-crystal diamond by microwave plasma CVD with high precursor utilization using cyclic gas injection and control of carbonaceous species content with optical emission spectroscopy
Yicun Li, Bing Dai, V. G. Ralchenko, Jilei Lyu, Xiaobin Hao, Jiwen Zhao, Sen Zhang, Kang Liu, Jiecai Han, A. P. Bolshakov, Jiaqi Zhu
Topics & Concepts
DiamondChemical vapor depositionRaman spectroscopyPhotoluminescenceAnalytical Chemistry (journal)Scanning electron microscopeIon sourceMicrowaveMethaneSpectroscopyMaterials scienceHydrogenPlasmaChemistryNanotechnologyOptoelectronicsOpticsOrganic chemistryQuantum mechanicsIonPhysicsComposite materialDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites