Emitter formation with boron diffusion from PECVD deposited boron-doped silicon oxide for high-efficiency TOPCon solar cells
Hao Cheng, Wei Liu, Zunke Liu, Zhenhai Yang, Dian Ma, Haojiang Du, Jun Luo, Haiyang Xing, Mingdun Liao, Yuheng Zeng, Baojie Yan, Jichun Ye
Topics & Concepts
Materials sciencePassivationPlasma-enhanced chemical vapor depositionSheet resistanceMonocrystalline siliconSiliconAnnealing (glass)WaferPolycrystalline siliconDopingCarrier lifetimeChemical vapor depositionSolar cellCommon emitterDopantBoronAnalytical Chemistry (journal)Crystalline siliconOptoelectronicsLayer (electronics)NanotechnologyMetallurgyChemistryChromatographyOrganic chemistryThin-film transistorSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence