Negating self-induced parametric excitation in capacitive ring-based MEMS Coriolis vibrating gyroscopes
Davin Arifin, Stewart McWilliam
Topics & Concepts
GyroscopeCapacitive sensingMicroelectromechanical systemsVibrating structure gyroscopeRing (chemistry)ExcitationParametric statisticsVibrationPhysicsAcousticsMaterials scienceElectrical engineeringEngineeringChemistryMathematicsOptoelectronicsQuantum mechanicsStatisticsOrganic chemistryAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsPhotonic and Optical Devices