Influence of ingot rocking on the surface quality of multi-wire sawing monocrystalline silicon wafers
Zhenqin Xu, Yong Feng, Long Pan, Xiaoyu Wang, Haoxiang Wang, Xiaolin Jia
Topics & Concepts
IngotMaterials scienceWaferMonocrystalline siliconSurface roughnessMetallurgySiliconReciprocating motionIndentation hardnessScanning electron microscopeComposite materialSurface finishMicrostructureOptoelectronicsMechanical engineeringAlloyEngineeringGas compressorAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdhesion, Friction, and Surface Interactions