An insight into polishing slurry for high quality and efficiency polishing of diamond
Song Yuan, Xiaoguang Guo, Ming Li, Zhuji Jin, Dongming Guo
Topics & Concepts
PolishingDiamondChemical-mechanical planarizationSlurryMaterials scienceLayer (electronics)MetallurgyAdsorptionChemical engineeringNanotechnologyComposite materialChemistryOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites