Blistering-free carbon-doped polysilicon (n+) passivating contact with high surface passivation properties prepared by industrial tube PECVD
Haojiang Du, Yiran Lin, Zhixue Wang, Mingdun Liao, Zunke Liu, Xijia Luo, Yuhong Cao, Liming Fu, Wei Liu, Baojie Yan, Zhenhai Yang, Zhizhong Yuan, Yuheng Zeng, Jichun Ye
Topics & Concepts
PassivationMaterials sciencePlasma-enhanced chemical vapor depositionDopingSiliconSaturation currentSolar cellCarrier lifetimeOptoelectronicsNanotechnologyLayer (electronics)VoltageElectrical engineeringEngineeringSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesIntegrated Circuits and Semiconductor Failure Analysis