Modularized batch production of 12-inch transition metal dichalcogenides by local element supply

Guodong Xue, Xin Sui, Peng Yin, Ziqi Zhou, Xiuzhen Li, Yang Cheng, Quanlin Guo, Shuai Zhang, Yao Wen, Yonggang Zuo, Chong Zhao, Muhong Wu, Peng Gao, Qunyang Li, Jun He, Enge Wang, Guangyu Zhang, Can Liu, Kaihui Liu, Kaihui Liu