PECVD SiNx passivation for AlGaN/GaN HFETs with ultra-thin AlGaN barrier
Hyun‐Seop Kim, Myoung‐Jin Kang, Won-Ho Jang, Kwang-Seok Seo, Hyungtak Kim, Ho‐Young Cha
Topics & Concepts
PassivationPlasma-enhanced chemical vapor depositionMaterials scienceOptoelectronicsSchottky barrierSilicon nitrideHeterojunctionBreakdown voltageNitrideChemical vapor depositionSiliconVoltageNanotechnologyLayer (electronics)Electrical engineeringDiodeEngineeringGaN-based semiconductor devices and materialsSemiconductor materials and devicesMetal and Thin Film Mechanics