Development of mesoporous abrasives and its unprecedented polishing performance elucidated by a novel atomic model
Zhensong Liu, Zhenyu Zhang, Yongfeng Sui, Qibo Peng, Jianqiang Li, Chunjing Shi, Jiansheng Zheng, Bin Tian
Topics & Concepts
Materials scienceMesoporous materialSilanolPolishingX-ray photoelectron spectroscopyChemical engineeringChemical-mechanical planarizationRaman spectroscopyComposite materialChemistryOrganic chemistryCatalysisEngineeringOpticsPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites