A smart sensor using MEMS technology for artificial environmental monitoring
Kaustubh Kumar Shukla, T. Muthumanickam
Topics & Concepts
MultiphysicsPressure sensorPiezoresistive effectCantileverMicroelectromechanical systemsMaterials scienceSmart materialVoltageCapacitanceElectrical resistance and conductanceMechanical engineeringStack (abstract data type)SiliconAcousticsComputer scienceElectronic engineeringFinite element methodNanotechnologyOptoelectronicsStructural engineeringElectrical engineeringComposite materialEngineeringProgramming languagePhysicsPhysical chemistryElectrodeChemistryAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsGas Sensing Nanomaterials and Sensors