Comment on “Phase transformation in MOCVD growth of (Al<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> thin films” [APL Mater. 8, 031104 (2020)]
Charlotte Wouters, Robert Schewski, M. Albrecht
Abstract
Phase transformation in MOCVD growth of (Al x Ga 1-x ) 2 O 3 thin films APL Mater (March 2020)
Topics & Concepts
Metalorganic vapour phase epitaxyMaterials scienceThin filmPhase (matter)X-ray crystallographyCrystallographyAnalytical Chemistry (journal)EpitaxyNanotechnologyDiffractionOpticsChemistryLayer (electronics)PhysicsOrganic chemistryChromatographyGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices