Effect of the annealing treatment on the physical and structural properties of LiNbO3 thin films deposited by radio-frequency sputtering at room temperature
Laura C. Sauze, Nicolas Vaxelaire, D. Rouchon, Roselyne Templier, Denis Rémiens, Guillaume Rodriguez, Florian Dupont
Topics & Concepts
Materials scienceAnnealing (glass)SputteringElectromechanical coupling coefficientThin filmSputter depositionOptoelectronicsLithium niobateSiliconComposite materialPiezoelectricityNanotechnologyFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator TechnologiesMicrowave Dielectric Ceramics Synthesis