Flexible piezoelectric micro ultrasonic transducer array integrated on various flexible substrates
Wei Liu, Chunling Zhu, Dawei Wu
Topics & Concepts
Ultrasonic sensorPiezoelectricityMaterials scienceTransducerPMUTFabricationAcousticsMicroelectromechanical systemsCapacitive micromachined ultrasonic transducersMiniaturizationSurface micromachiningAcoustic impedanceOptoelectronicsNanotechnologyComposite materialPathologyAlternative medicinePhysicsMedicineAdvanced Sensor and Energy Harvesting MaterialsTactile and Sensory InteractionsInnovative Energy Harvesting Technologies