An effect of hydrogenation on the photoemission of amorphous SiCN films
В. И. Иващенко, O. K. Porada, A.O. Kozak, V.S. Manzhara, O. K. Sinelnichenko, L. A. Ivashchenko, Rostislav V. Shevchenko
Topics & Concepts
X-ray photoelectron spectroscopyPhotoluminescenceAmorphous solidPlasma-enhanced chemical vapor depositionMaterials scienceAnalytical Chemistry (journal)Fourier transform infrared spectroscopyAmorphous siliconChemical vapor depositionPhotoemission spectroscopySiliconCrystalline siliconChemistryChemical engineeringNanotechnologyCrystallographyOptoelectronicsOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchThin-Film Transistor TechnologiesSemiconductor materials and devices