Highly Responsive Pd-Decorated MoO<sub>3</sub> Nanowall H<sub>2</sub> Gas Sensors Obtained from In-Situ-Controlled Thermal Oxidation of Sputtered MoS<sub>2</sub> Films
Soheil Mobtakeri, Saman Habashyani, Emre Gür
Abstract
gas as the carrier gas.
Topics & Concepts
Materials scienceThermal oxidationSputter depositionDeposition (geology)Substrate (aquarium)In situChemical engineeringCavity magnetronNanostructureTransition metalMetalThin filmSputteringNanotechnologyOptoelectronicsMetallurgySiliconCatalysisBiologyPaleontologyEngineeringMeteorologyOceanographyGeologyPhysicsChemistryBiochemistrySedimentGas Sensing Nanomaterials and SensorsTransition Metal Oxide NanomaterialsAnalytical Chemistry and Sensors