Materials and Sensing Mechanisms for High-Temperature Pressure Sensors: A Review
Yankun Chen, Qian Xu, Xiuqin Zhang, Minxuan Kuang
Abstract
High-temperature pressure sensors can be widely used in industries with high-temperature working conditions, such as aerospace, automotive, petroleum industry, and fire protection. Pressure sensors with excellent sensing performance and high-temperature tolerance will have broad application prospects in harsh environments. This review summarizes the research progress of high-temperature pressure sensors from aspects ranging from materials and working mechanisms to temperature compensation methods. Finally, challenges and trends in the field are briefly discussed. It is expected to benefit the scientific research community and promote further research and applications of high-temperature sensors.