A synergistic polishing technology by mixed abrasives with photocatalysis and fenton reaction
Wang Jiang, Hai Zhou, Youming Yang, Shixiang Hu, Jian Song, Jian Ji, Jinde Song
Topics & Concepts
PolishingMaterials scienceChemical-mechanical planarizationWaferSurface roughnessPhotocatalysisSurface finishComposite materialMetallurgyOptoelectronicsCatalysisChemistryBiochemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics