Highly efficient and atomic-scale smoothing of single crystal diamond through plasma-based atom-selective etching
Peng Liu, Yuxi Xiao, Yongjie Zhang, Quanpeng He, Hui Deng
Topics & Concepts
Dangling bondDiamondEtching (microfabrication)X-ray photoelectron spectroscopyChemistryCrystal (programming language)Raman spectroscopySingle crystalSmoothingAnalytical Chemistry (journal)Materials scienceNanotechnologyOptoelectronicsOpticsChemical engineeringCrystallographySiliconLayer (electronics)Computer visionPhysicsComputer scienceEngineeringOrganic chemistryProgramming languageChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques