Design and optimization of a high-efficiency MPCVD reactor for 4-inch diamond film deposition based on steady-state Multiphysics modeling
Wencong Zhang, Yong Yang, Huacheng Zhu, Xiaoshan Peng, Hongxing Tian, Dongxue Han, Renyu Peng, Li Wu, Wenyan Tian, Junwu Tao
Topics & Concepts
MultiphysicsSteady state (chemistry)DiamondMaterials scienceDeposition (geology)Nuclear engineeringNanotechnologyOptoelectronicsPhysicsComposite materialChemistryEngineeringFinite element methodThermodynamicsGeologySedimentPhysical chemistryPaleontologyDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesAdvanced Surface Polishing Techniques