Frequency-domain multi-scale Kolmogorov-Arnold representation attention network for mixed-type wafer defect recognition
Qihang Huang, Fan Zhang, Yuqian Zhao, Ji’an Duan
Topics & Concepts
Computer scienceRepresentation (politics)Scale (ratio)Domain (mathematical analysis)WaferType (biology)Artificial intelligencePattern recognition (psychology)Speech recognitionMaterials scienceMathematicsOptoelectronicsPoliticsPolitical scienceLawEcologyPhysicsMathematical analysisBiologyQuantum mechanicsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisSurface Roughness and Optical Measurements