Substrate temperature: A governing factor for the structural, mechanical and chemical properties of sputtered CrAlN ternary coating
Barsha Priyadarshini, Shahid Anwar, Shahid Anwar, Sharmistha Anwar, Sharmistha Anwar
Topics & Concepts
NanoindentationMaterials scienceElastic modulusCoatingChromium nitrideComposite materialSubstrate (aquarium)Sputter depositionNitrideTernary operationMetallurgyThin filmSputteringLayer (electronics)NanotechnologyProgramming languageGeologyOceanographyComputer scienceMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsSemiconductor materials and devices