Mo/Ti multilayer Bragg reflector for LiNbO3 film bulk acoustic wave resonators

Xiaoyuan Bai, Yao Shuai, Lu Lv, Shitian Huang, Ying Xing, Jiaoling Zhao, Wenbo Luo, Chuangui Wu, Tao Yang, Wanli Zhang

2020Journal of Applied Physics27 citationsDOI

Abstract

A 43° rotated Y-cut LiNbO3 (LN) single-crystal thin film coated with a bottom electrode and a Mo/Ti Bragg reflector is successfully transferred onto the 4-in. LN wafer substrate by means of crystal-ion-slicing (CIS) technique and benzocyclobutene bonding method. The multilayer film is crack-free, and the Mo/Ti reflector shows good acoustic reflection efficiency. A thin film bulk acoustic wave resonator based on the Mo/Ti Bragg reflector and the LN thin film (LN-BAW) is prepared, and the properties are further analyzed. The results indicate that the LN-BAW provides a large Kt2 of ∼16.63% and the Q-factor and figure-of-merit of the LN-BAW reach 183 and 30.4, respectively.

Topics & Concepts

Materials scienceDistributed Bragg reflectorResonatorReflector (photography)WaferThin filmReflection (computer programming)Figure of meritCrystal (programming language)Substrate (aquarium)OptoelectronicsSurface acoustic waveOpticsNanotechnologyProgramming languageGeologyOceanographyComputer scienceLight sourceWavelengthPhysicsAcoustic Wave Resonator TechnologiesPhotorefractive and Nonlinear OpticsFerroelectric and Piezoelectric Materials