To assure the industrial scale deposited CrN films can be used on Ti bipolar plates by HiPIMS method
Li Chen, Jianxiang Lv, Zhengde Wang, Hongruo Ma, Ruixuan Liu, Kaixiong Gao, Bin Zhang
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceMetallurgyScale (ratio)SputteringThin filmNanotechnologySputter depositionPhysicsQuantum mechanicsMetal and Thin Film MechanicsSemiconductor materials and devicesZnO doping and properties