Stripping GaN/InGaN epitaxial films and fabricating vertical GaN-based light-emitting diodes
Xiansheng Tang, Ziguang Ma, Lili Han, Zhen Deng, Yang Jiang, Wenxin Wang, Hong Chen, Chunhua Du, Haiqiang Jia
Topics & Concepts
Light-emitting diodeMaterials scienceOptoelectronicsSubstrate (aquarium)EpitaxyEtching (microfabrication)WaferDiodeNanotechnologyLayer (electronics)GeologyOceanographyGaN-based semiconductor devices and materialsZnO doping and propertiesMetal and Thin Film Mechanics