Ultrathin GaN film and AlGaN/GaN heterostructure grown on thick AlN buffer by MOCVD
Kai Chen, Yachao Zhang, Jincheng Zhang, Xing Wang, Yixin Yao, Jinbang Ma, Yue Hao
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyHeterojunctionBuffer (optical fiber)OptoelectronicsNanotechnologyLayer (electronics)EpitaxyTelecommunicationsComputer scienceGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties