Pixelation of GaN based Micro-LED arrays by tailoring injection energy and dose of fluorine ion implantation
Jinyu Ye, Yuyan Peng, Canlin Luo, Haonan Wang, Xiongtu Zhou, Tailiang Guo, Jie Sun, Qun Yan, Yongai Zhang, Chaoxing Wu
Topics & Concepts
FluorineIonOptoelectronicsMaterials scienceIon implantationRadiochemistryChemistryMetallurgyOrganic chemistryGaN-based semiconductor devices and materialsThin-Film Transistor TechnologiesZnO doping and properties