Towards aluminum oxide/aluminum nitride insulating stacks on 4H–SiC by atomic layer deposition
Bruno Galizia, Patrick Fiorenza, Emanuela Schilirò, B. Pécz, Zsolt Foragassy, Giuseppe Greco, Mario Saggio, Salvatore Cascino, Raffaella Lo Nigro, Fabrizio Roccaforte
Topics & Concepts
Materials scienceNitrideAluminum oxideAtomic layer depositionLayer (electronics)AluminiumOxideDeposition (geology)MetallurgyComposite materialPaleontologyBiologySedimentSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesCopper Interconnects and Reliability