Platinum metallization on silicon and silicates
J. Christopher Taylor
2021Journal of materials research/Pratt's guide to venture capital sources19 citationsDOIOpen Access PDF
Topics & Concepts
Materials sciencePlatinumMicrostructureSiliconEvaporationElectron beam physical vapor depositionContext (archaeology)Diffusion barrierDiffusionPhysical vapor depositionSputteringMetallurgyChemical vapor depositionThin filmNanotechnologyChemical engineeringEngineering physicsLayer (electronics)CatalysisBiologyThermodynamicsBiochemistryPhysicsChemistryEngineeringPaleontologySemiconductor materials and devicesCopper Interconnects and ReliabilitySemiconductor materials and interfaces